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Traceable automated calibration of ranges as low as 13 Pa (100 m Torr). Covers the range of 0 to 15 kPa (113 Torr) in gauge, absolute differential and absolute modes. Resolution to 1 mPa (0.0075 mTorr, 0.000004 in. H2O). Measurement uncertainty to ± (5 mPa + 30 ppm of reading) in gauge and absolute differential mode, ± (8 mPa + 30 ppm of reading) in absolute mode. Fully automated operation including pressure control and DUT data acquisition allows multi-increment tests to be run unattended. Integrated thermal transpiration correction available when needed.